ProductsView our product range
We deliver thin film tools with “built –in” flexibility for optics, optoelectronics and semiconductor. Choose from our batch and cluster platforms.
Robust source technologies for 24/7 production. Choose from evaporation, PVD, PECVD and ICP etch and dep technologies to fit your application.
ApplicationsSee our thin film process know how
Our applications team is ready to help you identify the right platform and processes. Contact us for help with standard processes or sampling.
Learn how Evatec makes "wafer level optics" possible at Semicon West, South Hall, Booth 223. Read more
More source options, more configurations, and higher yields. Read more
Now you can make DLC in your BAK too. Read more
Learn about in situ re-optimisation techniques mid process to increase yields.